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2012
Monitoring of meniscus motion at nozzle orifice with capacitive sensor for inkjet applications
Wei, J., Yue, C., Zhang, GQ., Dijksman, JF. & Sarro, PM., 2012, Proc. 11th IEEE Sensors Conference. IEEE Society, p. 2172-2175 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3 Citations (Scopus) -
2010
Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C
Mihailovic, M., Creemer, JF. & Sarro, PM., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 114-117 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Medea projekt T602: Process monitoring and yield management (0.5 um -0.35 um) (promyma) Confidential
Sarro, PM., 2000, Delft: Faculty of Information Technology and Systems, TU Delft.Research output: Book/Report › Report › Scientific
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2014
AlN piezoelectric films for sensing and actuation
Tran, AT., 2014, Delft, The Netherlands. 135 p.Research output: Thesis › Dissertation (TU Delft)
Open Access -
2008
Temperature calibration of fast scan calorimeter chips
Iervolino, E., van Herwaarden, AW. & Sarro, PM., 2008, Proceedings of the conference EUROSENSORS XXII. Gerlach, G. (ed.). Dresden, Germany: Verein Deutscher Ingenieure e.V., p. 773-776 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Conductivity detection for application in capillary electrophoresis microchips
Laugere, FPJ., 2003, s.l.: s.n.. 155 p.Research output: Thesis › Dissertation (TU Delft)
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2015
Dissolved organic nitrogen (DON) during batch denitrification of low concentrations of nitrate using suspended and attached biomass
Brandao, DN., Spanjers, H. & van Lier, JB., 2015, In: Water Science and Technology. 72, 11, p. 1896-1902 7 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access3 Citations (Scopus) -
2006
Piezoresistive cantilever for nano-Newton sensing in two dimensions
Chu Duc, T., Creemer, JF. & Sarro, PM., 2006, Proc. IEEE MEMS 2006 Conference. s.n. (ed.). Istanbul, Turkey: IEEE Society, p. 586-589 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
5 Citations (Scopus) -
2012
Encapsulated aluminum nitride SAW devices for liquid sensing applications
Tran, AT., Pandraud, G., Nie, M., Schellevis, H., Akhnoukh, A., Purniawan, A. & Sarro, PM., 2012, Proc. 11th IEEE Sensors Conference. IEEE Society, p. 604-607 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2002
Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
Iordanov, VP., Sarro, PM., Wolffenbuttel, RF. & Vellekoop, MJ., 2002, IPC No. niet eerder gehonnoreerd, Patent No. WO 02/090945 A2, Priority date 14 Nov 2002Research output: Patent
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2013
Heat flux sensor for power loss measurements of switching devices
Iero, D., Della Corte, FG., Fiorentino, G., Sarro, PM. & Morana, B., 2013, Proceedings - 19th international workshop on thermal investigations of ICs and systems. Raad, PE. (ed.). Piscataway, NJ, USA: IEEE Society, p. 327-330 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access10 Citations (Scopus) -
2001
Multi-anode Sawtooth SDD for X-ray Spectroscopy Fabricated on NTD Wafers
Sonsky, J., Hollander, RW., Sarro, PM. & van Eijk, CWE., 2001, In: IEEE Transactions on Nuclear Science. 2001, 48-3, p. 258-261 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
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2006
Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)
French, PJ. & Sarro, PM., 2006, MEMS, A practical guide to design, analysis and applications. Korvinck, JG. & Paul, O. (eds.). Norwich, NY: William Andrew Publishing, p. 805-851 47 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review
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2010
A position and force distribution sensor array for monitoring the contact condition of objects in micro handling
Wei, J., Porta, M., Tichem, M., Staufer, U. & Sarro, PM., 2010, Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. Suzuki, Y. & Wong, M. (eds.). Los Alamitos, CA, USA: IEEE Society, p. 623-626 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access3 Citations (Scopus) -
2000
Readout of a LaCl3(Ce3+) Scintillation Crystal with a Large Area Avalanche Photodiode
Allier, CP., Hollander, RW., Sarro, PM., de Boer, M., Czirr, JB. & van Eijk, CWE., 2000, Book of Abstracts of the 2000 IEEE NSS MIC conference, 15-20 October 2000, Lyon, France. p. 63-63Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
2 Citations (Scopus) -
2009
Fast response thermal linear motor with reduced power consumption.
Paalvast, SL., Pham, HTM., Sarro, PM. & Munnig Schmidt, RH., 2009, Proceedings of the Eurosensors XXIII Conference, august 2009. s.n. (ed.). Procedia Chemistry, p. 690-693 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
4 Citations (Scopus) -
1999
Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
Gennissen, PTJ., Ohji, H., French, PJ., Ashruf, CMA., O Halloran, GMO. & Sarro, PM., 1999, Eurosensors XIII: proceedings [CD-ROM]. M Bartek (ed.). Delft: Delft University of Technology, p. 1029-1032 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
LPCVD amorphous SiCx for freestanding electron transparent windows
Morana, B., Creemer, JF., Santagata, F., Fan, C. C., Pham, HTM., Pandraud, G., Tichelaar, FD. & Sarro, PM., 2010, Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. Suzuki, Y. & Wong, M. (eds.). Piscataway, NJ, USA: IEEE Society, p. 572-575 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3 Citations (Scopus) -
Silicon MEMS for detection of solid and liquid fronts
Wei, J., 2010, Delft. 133 p.Research output: Thesis › Dissertation (TU Delft)
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1999
Recent progress in technology and applications of membrane micromachined deformable mirrors
Vdovin, G., Sarro, PM., Gonté, F., Collings, N. & Dandliker, R., 1999, Proceedings of SPIE, vol. 3760. JD Gonglewski & MA Vorontsov (eds.). Bellingham: International Society for Optical Engineering, p. 2-11 10 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2009
Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
Santagata, F., Mele, L., Mihailovic, M., Morana, B., Creemer, JF. & Sarro, PM., 2009, Proceedings of IEEE Sensors 2009 Conference. IEEE Society, p. 799-802 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
1 Citation (Scopus) -
2006
Some properties of a room temperature THz detection array
Pandraud, G., Iordanov, VP., Kasalynas, I., Adam, AJL., Klaassen, TO., Hovenier, JN. & Sarro, PM., 2006, Some properties of a room temperature THz detection array. s.n. (ed.). Vilnius, Lithuania: SPIE, p. 1-7 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2005
Integrated antiresonant hollow core waveguides as a platform for microoptical-microfluidic µTAS applications
Bernini, R., De Nuccio, E., Mottola, F., Minardo, A., Sarro, PM. & Zeni, L., 2005, Eurosensors XIX, Proceedings. R Reus, D. & S Bouwstra (eds.). Piscataway: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Improving methane production and phosphorus release from saline sludge in anaerobic digestion
Zhang, X., Ferreira, RB., Hu, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-5 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices
Alan, T. & Sarro, PM., 2007, Material research society symposium proceeding. LaVan, DA., da Silva, MG., Spearing, SM. & Vengallatore, S. (eds.). Warrendale: Materials Research Society, p. 1-5 5 p. (Materials Research Society Symposium Proceedings; vol. 1052).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Multi-anode sawtooth SDD for x-ray spectroscopy fabricated on NTD wafers
Sonský, J., Hollander, RW., van Eijk, CWE., Sarro, PM. & Kouchpil, V., 2001, In: IEEE Transactions on Nuclear Science. 48, 3, p. 258-261 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
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2009
Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
Tran, AT., Schellevis, H., Shen, C., Pham, HTM. & Sarro, PM., 2009, Proc. of SAFE 2009. French, PJ. (ed.). Veldhoven, the Netherlands: STW, p. 121-124 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional
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2011
MEMS silicon-based micro-evaporator
Mihailovic, M., Rops, CM., Hao, J., Mele, L., Creemer, JF. & Sarro, PM., 2011, In: Journal of Micromechanics and Microengineering. 21, 7, p. 1-9 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access11 Citations (Scopus) -
Layer-by-layer deposition of colloidal semiconductor nanocrystals for integration of infrared photon-detectors on 3D topography
Wei, J., Gao, Y., Houtepen, AJ., Pandraud, G. & Sarro, PM., 2011, Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). Fan et al, L-S. (ed.). Piscataway, NJ, USA: IEEE Society, p. 1749-1752 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access -
2012
Anaerobic digestion
Batstone, DJ., Spanjers, H., Rodriguez, J. & van Lier, JB., 2012, Global trends & challenges in water science, reserch and management. Hong Li (ed.). London: International Water Association (IWA), p. 1-3 107 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
A model for film thickness using direct spray coating
Pham, PN., Burghartz, JN. & Sarro, PM., 2003, EPTC 2003; proceedings. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2005
Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films
Pham, TMH., de Boer, CR., Visser, CCG. & Sarro, PM., 2005, In: Electrochemical Society. Journal. 152, 11, p. 889-893 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access1 Citation (Scopus) -
2000
Characterization of a bulk-micromachined post-process module for silicon RF technology
Ng, TK., Pham, PN., Sarro, PM., Rejaei Salmassi, B. & Burghartz, JN., 2000, Proceedings. Piscataway: IEEE Society, p. 99-102 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
11 Citations (Scopus) -
1999
Lamb wave sensor with tensile ZnO for liquid property sensing
Koller, S., Brand, O., Baltes, H., Jakoby, BH., Sarro, PM. & Vellekoop, MJ., 1999, Transducers '99: digest of technical papers. Vol. 2. Tokyo: Institute of Electrical Engineers of Japan, p. 1512-1515 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1996
Silicon Drift Detectors for the Detection of X-rays and gamma-rays
Valk, H., Hijzen, EA., Huizenga, J., van Eijk, CWE., Hollander, RW., Nanver, LK., Sarro, PM., van Bogaard, A. & Slabbekoorn, J., 1996, Proceedings of the 1996 National Sensor Conference. Dorenbos, P. & van Eijk, CWE. (eds.). Delft: Delft University Press, p. 103-107 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2000
A sub-surface metallization post-process IC module for RF technology
Ng, TK., Pham, PN., Rejaei Salmassi, B., Sarro, PM. & Burghartz, JN., 2000, BCTM 2000 proceedings. Piscataway: IEEE Society, p. 195-198 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
SU-8 structures for integrated high-speed screening
Gray, BL., Iordanov, VP., Sarro, PM. & Bossche, A., 2002, Micro total analysis systems 2002; proceedings of the µTAS 2002 symposium. Baba, Y., Shoji, S. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 464-466 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
Thermal actuation for percision micro motion and positioning
Paalvast, SL., 2010, Delft. 212 p.Research output: Thesis › Dissertation (TU Delft)
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2019
Gas recovery from wastewater
van Lier, J., Spanjers, H. & van Linden, N., 2019, IPC No. B01D, C02F, Priority date 1 Feb 2018, Priority No. WO 2019/151855Research output: Patent
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2005
An ammonia sensor based on porous SIC membrane
Connolly, EJ., Timmer, B., Pham, TMH., Groeneweg, J., Sarro, PM., Olthuis, W. & French, PJ., 2005, Eurosensors XIX, Proceedings. s.n. (ed.). Piscataway: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Low temperature LPCVD SiN direct bonding for sensors
Hsu, CL., Pandraud, G., Creemer, JF., French, PJ. & Sarro, PM., 2005, Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). s.n. (ed.). Den Haag: Dutch Technology Foundation, p. 162-166 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Integrated shape sensor for particles and cells based on optical projection
Nieuwenhuis, JH., Lubking, W., Berthold, A., Sarro, PM. & Vellekoop, MJ., 2000, SAFE-ProRISC-SeSens 2000: proceedings. JP Veen (ed.). Utrecht: STW Technology Foundation, p. 669-672 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Though-wafer copper electropating for 3-D interconnects
Nguyen, NT., Boellaard, E., Pham, PN., Kiutchoukov, VG., Cracium, G. & Sarro, PM., 2001, MME 2001. S.l.: s.n., p. 74-77 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2011
TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
Purniawan, A., Pandraud, G., French, PJ. & Sarro, PM., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS). Xia, S., Bao, M. & Fan, L-S. (eds.). Beijing, China: IEEE Society, p. 2506-2509 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access6 Citations (Scopus) -
1998
Thin photodiodes for a scintillator-silicon well dectector
Allier, CP., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1998, Proceedings of the 28th ESSDERC98. A Toubout, Y Danto, JP Klein & H Grunbacher (eds.). Bordeau: Frontieres, p. 176-179 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Sealing RIE etch holes for an epi-micromachined pressure sensor
Goosen, JFL., Dartee, JP., den Boer, C., French, PJ. & Sarro, PM., 2000, MME '00. Y Bäcklund & C Hedlund (eds.). S.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
Oxide to oxide wafer bonding for three dimensional (3D) IC integration technologies
Cannavo, M., van Zeijl, HW., Pandraud, G., Driel, JV., Alan, T. & Sarro, PM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). Veldhoven, The Netherlands: STW, p. 509-512 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Fouling control in anaerobic membrane bioreactors under saline conditions
Yang, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2010
A 80nm thick silicon nanosheet FET for sensing applications
Moh, TSY., Pandraud, G., Tong, HD., de Smet, LCPM., Sudholter, EJR., Rijn, C. & Sarro, PM., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 122-126 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
First measurement results with an integrated projection citometer
Nieuwenhuis, JH., Bastemeijer, J., Sarro, PM. & Vellekoop, MJ., 2003, MTAS 2003 Seventh international conference on micro total analysis systems. Northrup, MA., Jensen, KF. & Harrison, DJ. (eds.). San Diego: Transducer Research Foundation, p. 1219-1222 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review