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2012
Design and validation of an epidural needle insertion simulator with haptic feedback for training resident anaesthesiologists
Manoharan, V., Van Gerwen, D., Van Den Dobbelsteen, J. J. & Dankelman, J., 2012, Proceedings IEEE Haptics Symposium 2012. Piscataway, NJ, USA: IEEE, p. 341-348 6183812Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
18 Citations (Scopus) -
2010
Efficient locomotion on non-wheeled snake-like robots
Colorado, J., Barrientos, A., Rossi, C., Garzón, M., Galán, M. & Del Cerro, J., 7 Dec 2010, ICINCO 2010 - Proceedings of the 7th International Conference on Informatics in Control, Automation and Robotics. p. 246-251 6 p. (ICINCO 2010 - Proceedings of the 7th International Conference on Informatics in Control, Automation and Robotics; vol. 2).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3 Citations (Scopus) -
2023
Business Models for cost-effective building renovation at district level combining energy efficiency & renewables
Konstantinou, T., Haase, M., Hidalgo-Betanzos, J. M., Motoasca, E., Conci, M., Winkels, Z., Mlecnik, E., Meyer, H. & Johansson, E., 2023, University of Minho. 142 p.Research output: Book/Report › Report › Scientific
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2013
Optofluidics: A new tool for sensing
Testa, G., Persichetti, G., Zeni, L., Sarro, PM. & Bernini, R., 2013, Proceedings SPIE - 5th European Workshop on Optical Fibre Sensors. Jaroszewicz, LR. (ed.). Bellingham, WA, USA: SPIE, p. 1-6 6 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 8794).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access5 Citations (Scopus) -
2004
High-aspect-ratio bulk micromachined vias contacts
Pham, NP. & Sarro, PM., 2004, SAFE 2004; Semiconductor advances for future electronics. Utrecht: STW Technology Foundation, p. 657-661 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2005
The fabrication of optical hole-arrays for use in the atto-liter titer plate device for single molecule detection
Piciu, OM., van der Krogt, MC., Docter, MW., Sarro, PM. & Bossche, A., 2005, Eurosensors XIX. R Reus, D. & S Bouwstra (eds.). Piscataway: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2002
Virtual flow channel: a novel micro-fluidics system with orthogonal, dynamic control of sample flow dimensions
Nieuwenhuis, JH., Bastemeijer, J., Sarro, PM. & Vellekoop, MJ., 2002, Micro total analysis systems 2002: proceedings of the µTAS 2002 symposium, held in Nara, Japan. Baba, Y., Shoji, S. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 103-105 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Effect of silicon nanowire etching on signal-to-noise ratio of SiNW FETs for (bio)sensor applications
Moh Shan Yau, T., Nie, M., Pandraud, G., de Smet, LCPM., Sudholter, EJR., Huang, Q-A. & Sarro, PM., 2013, In: Electronics Letters. 49, 13, p. 1-2 2 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access7 Citations (Scopus) -
1999
Piezoelectric ZnO membrane resonators for liquid property sensing
Koller, S., Brand, O., Sarro, PM., Vellekoop, MJ. & Baltes, H., 1999, Eurosensors XIII: proceedings. M Bartek (ed.). Delft: Delft University of Technology, p. 677-680 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Scintillation Light Read-out by thin Photodiodes in Silicon Wells
Allier, CP., Hollander, RW., Sarro, PM. & van Eijk, CWE., 1999, Book of abstracts of the 2nd Conference on New Developments in Photodetection BEAUNE99, Beaune, France, June 21-25,1999. p. 121-121Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2007
Nano-hole Arrays in Thin Au/Pd Film on Glass, for High Speed Molecular Analysis
Piciu, OM., van der Krogt, MC., Tatar, F., Sarro, PM., Bossche, A., Docter, MW., Garini, Y. & Young, IT., 2007, Proceedings of 5th IEEE Conference on Sensors. s.n. (ed.). New York: IEEE Society, p. 608-611 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Polyimide sacrificial layer for an all-dray post-process surface micromachining module
Pham, TMH., Bagolini, A., de Boer, CR., Laros, JMW., Pakula, L., French, PJ. & Sarro, PM., 2003, Transducers'03 Digest of technical papers. Piscataway: IEEE Society, p. 813-816 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2004
A quantitative evaluation of pattern transfer across (111) surfaces in a (100) silicon wafer by contact masking and over-exposure
Venstra, WJ., Laros, M., Spronck, JW., Sarro, PM. & Eijk, J., 2004, Eurosensors XVIII. Palombie (ed.). Rome: University of Rome, p. 313-316 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1998
Experimental results of electron Confinement in a silicon drift detector with saw tooth shaped P(+) strips
Sonsky, J., Valk, H., Huizenga, J., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1998, Book of abstracts of the IEEE'98 Conference, Toronto, November 1998. p. -Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2009
A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation
Shen, C., Pham, TMH. & Sarro, PM., 2009, Micro Electro Mechanical Systems, 2009. M Sarro, P. & Hierold, C. (eds.). Sorrento, Italy: The Printing House, Inc., p. 383-386 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
4 Citations (Scopus) -
2006
A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness
van Zeijl, HW., Su, J., Paalvast, SL., Sarro, PM. & van Eijk, J., 2006, Proceedings of the 17th MME MicroMechanics Europe Workshop. s.n. (ed.). Southampton: H.Morgan Ed., p. 209-212 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1999
Fabrication of a focal plane array infrared detector for a satellite attitude control system
van Herwaarden, AW., van Herwaarden, FG., Molenaar, SA., Goudena, EJG., Laros, JMW., Sarro, PM., Schot, CA., van der Vlist, W., Blarre, L. & Krebs, JP., 1999, Transducers '99: digest of technical papers. Vol. 1. Tokyo: Institute of Electrical Engineers of Japan, p. 394-397 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Polymide sacrificial layer for an all-dry post-process surface micromachining module
Pham, TMH., Bagolini, A., de Boer, CR., Laros, JMW., Pakula, L., French, PJ. & Sarro, PM., 2003, TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems. s.n. (ed.). Piscataway: IEEE Society, p. 813-816 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate
Yan, B., Pham, HTM., Ma, Y., Zhuang, Y. & Sarro, PM., 2007, In: Applied Physics Letters. 91Research output: Contribution to journal › Article › Scientific › peer-review
17 Citations (Scopus) -
2002
Fluorescence measurements in thick-film polymer wells
Gray, BL., Iordanov, VP., Sarro, PM. & Bossche, A., 2002, Proceedings of SeSens 2002. Utrecht: STW Stichting voor de Technische Wetenschappen, p. 622-626 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1999
Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions
Sarro, PM., Brida, D., van der Vlist, W., Pignatel, G. & Brida, S., 1999, Eurosensors XIII: proceedings [CD-ROM]. M Bartek (ed.). Delft: Delft University of Technology, p. 389-392 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Micromachining techniques for fabrication of integrated light modulating devices
Sakarya, S., 2003, s.l.: s.n.. 133 p.Research output: Thesis › Dissertation (TU Delft)
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2011
In situ HRTEM of a catalyst using a nanoreactor at 1 bar
Vendelbo, SB., Creemer, JF., Helveg, S., Morana, B., Mele, L., Molenbroek, AM., Sarro, PM., Zandbergen, HW. & Kooyman, PJ., 2011.Research output: Contribution to conference › Poster › Professional
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2006
a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness
Su, J., van Zeijl, HW., Paalvast, SL., Sarro, PM. & van Eijk, J., 2006, SAFE conferentie. SN (ed.). Veldhoven: SAFE, p. 394-397 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
49 Citations (Scopus) -
2008
Front to back-side 3D interconnects fabrication process based on controlled cu electroplating of high aspect ratio through silicon vias (HAR-TSVs)
Saadaoui, M., Wien, WHA., van Zeijl, HW., Schellevis, H., Laros, M. & Sarro, PM., 2008, 10th electronics packaging technology conference. Yang, T. & Kheng, T. (eds.). Singapore: IEEE Society, p. 219-223 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
8 Citations (Scopus) -
2000
Infrared thermal imaging of SiNx membranes
Irace, A., Breglio, G., Spirito, M. & Sarro, PM., 2000, Proceedings of SPIE, vol. 4130. BF Andresen, GF Fulop & M Strojnik (eds.). Bellingham: International Society for Optical Engineering, p. 1-7 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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1996
A Silicon Drift Detector used for the Read-out of a CsI:Tl Scintillator
Valk, H., Hijzen, EA., de Haas, JTM., Hollander, RW., van Eijk, CWE., Sarro, PM. & van Bogaard, A., 1996, Proceedings of the International Conference on Inorganic Scintillators and Their Applications, SCINT95. Dorenbos, P. & van Eijk, ECW. (eds.). Delft: Delft University Press, p. 544-546 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2008
A novel method to prevent pattern rotation in anisotropic wet etch
Shen, C., Pham, HTM., Dekker, R. & Sarro, PM., 2008, APCTP-ASEAN workshop on advanced material science and nanotechnology. van Nguyen, H. (ed.). Nha Trang, Vietnam: Academic press of vietnam academy of science and technology, p. 944-950 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
27 Citations (Scopus) -
2006
Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan
Creemer, JF., Zandbergen, HW. & Sarro, PM., 2006, IPC No. P70180NL00, Patent No. 1027025, Priority date 5 May 2006Research output: Patent
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2010
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Wei, J., Yue, C., Chen, ZL., Liu, ZW. & Sarro, PM., 2010, In: Journal of Micromechanics and Microengineering. 20, 6, p. 1-8 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access9 Citations (Scopus) -
1999
X-ray spectroscopy measurements with multi-anode saw tooth silicon drift detector
Sonsky, J., Huizenga, J., van Eijk, CWE. & Sarro, PM., 1999, Book of abstracts of the 5th International Conference on Position-Sensitive Detectors, University College London, September 13-17, 1999, United Kingdom. p. 24-24Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
Werkwijze voor het uitvoeren van een assay, inrichting daarvoor, alsmede een werkwijze voor het vervaardigen van een inrichting
Iordanov, VP., Sarro, PM., Wolffenbuttel, RF. & Vellekoop, MJ., 2003, IPC No. niet eerder opgenomen, Patent No. 1017989, Priority date 5 Nov 2002Research output: Patent
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2007
Integrated Silicon-polymer laterally stacked actuators for out-of-plane bending motion
Wei, J., Chu Duc, T. & Sarro, PM., 2007, Proc. 18th MicroMechanics Europe (MME 2006). s.n. (ed.). Guimares, Portugal: Univ.of Minho.Ed., p. 187-190 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
SENSING MICROGRIPPER WITH PID CONTROL
Phan Huu, P., Nguyen, VQ., Chu Duc, T. & Sarro, PM., 2008, Proc. of 2008 International Conference on Advanced Technologies for Communications. van Ngo, N. & Cheung, NK. (eds.). Hanoi, Vietnam: IEEE Society, p. 319-322 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2 Citations (Scopus) -
2009
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
Rajaraman, V., Pakula, LS., Pham, HTM., Sarro, PM. & French, PJ., 2009, Proc. IEEE MEMS 2009. Sarro, PM. & Hierold, C. (eds.). Sorrento, Italy: IEEE Society, p. 140-143 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
9 Citations (Scopus) -
2004
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2005
Polarization-insensitive PECVD SiC waveguides for photonic sensing
Pandraud, G., Pham, TMH., Pakula, L., Sarro, PM. & French, PJ., 2005, 17th International Conference on Optical Fibre Sensors. Voet, M., Willsch, R., Ecke, W., Jones, J. & Culshaw, B. (eds.). Bellingham: SPIE, p. 836-839 4 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 5855).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access1 Citation (Scopus) -
2006
Improved Thermal U-beam Actuators for Micro-assembly
Henneken, VA., Tichem, M. & Sarro, PM., 2006, XX Eurosensors. s.l (ed.). Göteborg: Chalmers University of Technology, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Through-wafer copper electroplating for 3-D interconnects
Nguyen, NT., Boellaard, E., Pham, HMT., Kiutchoukov, VG., Cracium, G. & Sarro, PM., 2001, MME 2001: workshop. S.l.: s.n., p. 74-77 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
Through-wafer copper electroplating for three-dimensional interconnects
Nguyen, NT., Boellaard, E., Pham, NP., Kutchoukov, VG., Craciun, G. & Sarro, PM., 2002, In: Journal of Micromechanics and Microengineering. 12, p. 395-399 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
121 Citations (Scopus) -
1999
X-ray Detection With Multi-anode Sawtooth Silicon Drift Detector
Sonsky, J., Huizenga, J., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1999, Book of abstracts of the IEEE 1999 Nuclear Science Symposium and Medical Imaging Conference, October 26-30, 1999, Seattle, USA. p. 9-9Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
Fabrication of a CMOS compatible vertical accelerometer
Pakula, L., Yang, H., Pham, TMH., Sarro, PM. & French, PJ., 2003, EUROSENSORS 17th European conference on solid-state transducers. s.n. (ed.). Guimarães: University of Minho, p. 635-638 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2006
Optical Nano-hole Arrays for Molecular Recognition and Detection (U-SP-2-I-ICT)
Piciu, OM., van der Krogt, MC., Sarro, PM., Bossche, A. & Docter, MW., 2006, Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology¿APCOT 2006. s.n. (ed.). s.l.: apcot, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2005
Lateral nano-Newton force-sensing piezoresistive cantilever for micro-particels handling
Chu Duc, T., Creemer, JF. & Sarro, PM., 2005, Proceedings of the 16th MME Micromachining, Micromechanics and Microsystems Workshop 2005. s.n. (ed.). Göteborg, Sweden: MME, p. 268-271 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
Finite element modeling and experimental characterization of an electro-thermally actuated silicon-polymer micro gripper
Krecinic, F., Chu Duc, T., Lau, GK. & Sarro, PM., 2008, In: Journal of Micromechanics and Microengineering. 18, 6Research output: Contribution to journal › Article › Scientific › peer-review
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2007
Characterization of a Nozzle-Integrated Capacitive Sensor for Microfluidic Jet Systems
van der Velden, M., Spronck, JW., Munnig Schmidt, RH., Wei, J. & Sarro, PM., 2007, Proc. IEEE Sensors 2007 Conference. Mizaikoff, B. & French, PJ. (eds.). Atlanta, Georgia, USA: IEEE Society, p. 1241-1244 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2011
Mechanical robustness and hermeticity monitoring for MEMS thin film encapsulation
Santagata, F., 2011, 133 p.Research output: Thesis › Dissertation (TU Delft)
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2007
Sub-wavelength apertures in Au/Pd film for fluorescence measurements
Piciu, OM., van der Krogt, MC., Docter, MW., Garini, Y., Young, IT., Sarro, PM. & Bossche, A., 2007, Sub-wavelength apertures in Au/Pd film for fluorescence measurements. s.n. (ed.). Zeist, The Netherlands: Sense of Contact 2009, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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1999
IC-compatible two-level bulk micromachining for RF components
Pham, PN., Ng, TK., Laros, JMW., Scholtes, TLM., Sarro, PM. & Burghartz, JN., 1999, SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]. Utrecht: STW Technology Foundation, p. 359-362 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2012
A novel approach for piezoresistivity characterization of silicon nanowires
Nie, M., Santagata, F., Moh, TSY., Huang, Q-A. & Sarro, PM., 2012, Proc. 11th IEEE Sensors Conference. IEEE Society, p. 1747-1750 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review