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2009
Fast response thermal linear motor with reduced power consumption.
Paalvast, SL., Pham, HTM., Sarro, PM. & Munnig Schmidt, RH., 2009, Proceedings of the Eurosensors XXIII Conference, august 2009. s.n. (ed.). Procedia Chemistry, p. 690-693 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
4 Citations (Scopus) -
1999
Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
Gennissen, PTJ., Ohji, H., French, PJ., Ashruf, CMA., O Halloran, GMO. & Sarro, PM., 1999, Eurosensors XIII: proceedings [CD-ROM]. M Bartek (ed.). Delft: Delft University of Technology, p. 1029-1032 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
LPCVD amorphous SiCx for freestanding electron transparent windows
Morana, B., Creemer, JF., Santagata, F., Fan, C. C., Pham, HTM., Pandraud, G., Tichelaar, FD. & Sarro, PM., 2010, Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. Suzuki, Y. & Wong, M. (eds.). Piscataway, NJ, USA: IEEE Society, p. 572-575 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3 Citations (Scopus) -
Silicon MEMS for detection of solid and liquid fronts
Wei, J., 2010, Delft. 133 p.Research output: Thesis › Dissertation (TU Delft)
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1999
Recent progress in technology and applications of membrane micromachined deformable mirrors
Vdovin, G., Sarro, PM., Gonté, F., Collings, N. & Dandliker, R., 1999, Proceedings of SPIE, vol. 3760. JD Gonglewski & MA Vorontsov (eds.). Bellingham: International Society for Optical Engineering, p. 2-11 10 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2009
Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
Santagata, F., Mele, L., Mihailovic, M., Morana, B., Creemer, JF. & Sarro, PM., 2009, Proceedings of IEEE Sensors 2009 Conference. IEEE Society, p. 799-802 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
1 Citation (Scopus) -
2006
Some properties of a room temperature THz detection array
Pandraud, G., Iordanov, VP., Kasalynas, I., Adam, AJL., Klaassen, TO., Hovenier, JN. & Sarro, PM., 2006, Some properties of a room temperature THz detection array. s.n. (ed.). Vilnius, Lithuania: SPIE, p. 1-7 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2005
Integrated antiresonant hollow core waveguides as a platform for microoptical-microfluidic µTAS applications
Bernini, R., De Nuccio, E., Mottola, F., Minardo, A., Sarro, PM. & Zeni, L., 2005, Eurosensors XIX, Proceedings. R Reus, D. & S Bouwstra (eds.). Piscataway: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Improving methane production and phosphorus release from saline sludge in anaerobic digestion
Zhang, X., Ferreira, RB., Hu, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-5 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices
Alan, T. & Sarro, PM., 2007, Material research society symposium proceeding. LaVan, DA., da Silva, MG., Spearing, SM. & Vengallatore, S. (eds.). Warrendale: Materials Research Society, p. 1-5 5 p. (Materials Research Society Symposium Proceedings; vol. 1052).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Multi-anode sawtooth SDD for x-ray spectroscopy fabricated on NTD wafers
Sonský, J., Hollander, RW., van Eijk, CWE., Sarro, PM. & Kouchpil, V., 2001, In: IEEE Transactions on Nuclear Science. 48, 3, p. 258-261 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
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2009
Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
Tran, AT., Schellevis, H., Shen, C., Pham, HTM. & Sarro, PM., 2009, Proc. of SAFE 2009. French, PJ. (ed.). Veldhoven, the Netherlands: STW, p. 121-124 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional
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2011
MEMS silicon-based micro-evaporator
Mihailovic, M., Rops, CM., Hao, J., Mele, L., Creemer, JF. & Sarro, PM., 2011, In: Journal of Micromechanics and Microengineering. 21, 7, p. 1-9 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access11 Citations (Scopus) -
Layer-by-layer deposition of colloidal semiconductor nanocrystals for integration of infrared photon-detectors on 3D topography
Wei, J., Gao, Y., Houtepen, AJ., Pandraud, G. & Sarro, PM., 2011, Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). Fan et al, L-S. (ed.). Piscataway, NJ, USA: IEEE Society, p. 1749-1752 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access -
2012
Anaerobic digestion
Batstone, DJ., Spanjers, H., Rodriguez, J. & van Lier, JB., 2012, Global trends & challenges in water science, reserch and management. Hong Li (ed.). London: International Water Association (IWA), p. 1-3 107 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
A model for film thickness using direct spray coating
Pham, PN., Burghartz, JN. & Sarro, PM., 2003, EPTC 2003; proceedings. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2005
Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films
Pham, TMH., de Boer, CR., Visser, CCG. & Sarro, PM., 2005, In: Electrochemical Society. Journal. 152, 11, p. 889-893 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access1 Citation (Scopus) -
2000
Characterization of a bulk-micromachined post-process module for silicon RF technology
Ng, TK., Pham, PN., Sarro, PM., Rejaei Salmassi, B. & Burghartz, JN., 2000, Proceedings. Piscataway: IEEE Society, p. 99-102 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
11 Citations (Scopus) -
1999
Lamb wave sensor with tensile ZnO for liquid property sensing
Koller, S., Brand, O., Baltes, H., Jakoby, BH., Sarro, PM. & Vellekoop, MJ., 1999, Transducers '99: digest of technical papers. Vol. 2. Tokyo: Institute of Electrical Engineers of Japan, p. 1512-1515 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1996
Silicon Drift Detectors for the Detection of X-rays and gamma-rays
Valk, H., Hijzen, EA., Huizenga, J., van Eijk, CWE., Hollander, RW., Nanver, LK., Sarro, PM., van Bogaard, A. & Slabbekoorn, J., 1996, Proceedings of the 1996 National Sensor Conference. Dorenbos, P. & van Eijk, CWE. (eds.). Delft: Delft University Press, p. 103-107 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2000
A sub-surface metallization post-process IC module for RF technology
Ng, TK., Pham, PN., Rejaei Salmassi, B., Sarro, PM. & Burghartz, JN., 2000, BCTM 2000 proceedings. Piscataway: IEEE Society, p. 195-198 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
SU-8 structures for integrated high-speed screening
Gray, BL., Iordanov, VP., Sarro, PM. & Bossche, A., 2002, Micro total analysis systems 2002; proceedings of the µTAS 2002 symposium. Baba, Y., Shoji, S. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 464-466 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
Thermal actuation for percision micro motion and positioning
Paalvast, SL., 2010, Delft. 212 p.Research output: Thesis › Dissertation (TU Delft)
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2019
Gas recovery from wastewater
van Lier, J., Spanjers, H. & van Linden, N., 2019, IPC No. B01D, C02F, Priority date 1 Feb 2018, Priority No. WO 2019/151855Research output: Patent
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2005
An ammonia sensor based on porous SIC membrane
Connolly, EJ., Timmer, B., Pham, TMH., Groeneweg, J., Sarro, PM., Olthuis, W. & French, PJ., 2005, Eurosensors XIX, Proceedings. s.n. (ed.). Piscataway: IEEE Society, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Low temperature LPCVD SiN direct bonding for sensors
Hsu, CL., Pandraud, G., Creemer, JF., French, PJ. & Sarro, PM., 2005, Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). s.n. (ed.). Den Haag: Dutch Technology Foundation, p. 162-166 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Integrated shape sensor for particles and cells based on optical projection
Nieuwenhuis, JH., Lubking, W., Berthold, A., Sarro, PM. & Vellekoop, MJ., 2000, SAFE-ProRISC-SeSens 2000: proceedings. JP Veen (ed.). Utrecht: STW Technology Foundation, p. 669-672 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Though-wafer copper electropating for 3-D interconnects
Nguyen, NT., Boellaard, E., Pham, PN., Kiutchoukov, VG., Cracium, G. & Sarro, PM., 2001, MME 2001. S.l.: s.n., p. 74-77 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2011
TiO2 freestanding thin film as evanescent waveguide sensor for biomedical application
Purniawan, A., Pandraud, G., French, PJ. & Sarro, PM., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS). Xia, S., Bao, M. & Fan, L-S. (eds.). Beijing, China: IEEE Society, p. 2506-2509 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access6 Citations (Scopus) -
1998
Thin photodiodes for a scintillator-silicon well dectector
Allier, CP., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1998, Proceedings of the 28th ESSDERC98. A Toubout, Y Danto, JP Klein & H Grunbacher (eds.). Bordeau: Frontieres, p. 176-179 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Sealing RIE etch holes for an epi-micromachined pressure sensor
Goosen, JFL., Dartee, JP., den Boer, C., French, PJ. & Sarro, PM., 2000, MME '00. Y Bäcklund & C Hedlund (eds.). S.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
Oxide to oxide wafer bonding for three dimensional (3D) IC integration technologies
Cannavo, M., van Zeijl, HW., Pandraud, G., Driel, JV., Alan, T. & Sarro, PM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). Veldhoven, The Netherlands: STW, p. 509-512 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Fouling control in anaerobic membrane bioreactors under saline conditions
Yang, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2010
A 80nm thick silicon nanosheet FET for sensing applications
Moh, TSY., Pandraud, G., Tong, HD., de Smet, LCPM., Sudholter, EJR., Rijn, C. & Sarro, PM., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 122-126 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
First measurement results with an integrated projection citometer
Nieuwenhuis, JH., Bastemeijer, J., Sarro, PM. & Vellekoop, MJ., 2003, MTAS 2003 Seventh international conference on micro total analysis systems. Northrup, MA., Jensen, KF. & Harrison, DJ. (eds.). San Diego: Transducer Research Foundation, p. 1219-1222 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2011
A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
Morana, B., Santagata, F., Mele, L., Mihailovic, M., Pandraud, G., Creemer, JF. & Sarro, PM., 2011, 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011). Böhringer, K. & Lin, L. (eds.). Piscataway, NJ, USA: IEEE Society, p. 380-383 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access20 Citations (Scopus) -
2000
Medea Project review Project T651: Design for manufacturability & rapid technology learning (confidential)
Sarro, PM., 2000, Delft: Faculty of Information Technology and Systems, TU Delft.Research output: Book/Report › Report › Scientific
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2001
New post-processing modules
Pakula, L., Pham, HMT., de Boer, CR., Sarro, PM. & French, PJ., 2001, SAFE - ProRISC - SeSens 2001: proceeding. Semicoductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation, p. 848-851 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography
Olivadoti, C., Pham, HTM. & Sarro, PM., 2007, Proc. 18th MicroMechanics Europe (MME 2006). s.n. (ed.). Guimares, Portugal: Univ.of Minho.Ed., p. 195-198 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Investigation into the factors affecting the shaft resistance of driven piles in sands
Igoe, D., Gavin, K. & Kirwan, L., 2013, Installation Effects in Geotechnical Engineering - Proceedings of the International Conference on Installation Effects in Geotechnical Engineering, ICIEGE 2013. p. 252-257 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
1 Citation (Scopus) -
2016
Design of a versatile voltage based output stage for implantable neural stimulators
Van Dongen, M. N. & Serdijn, W. A., 2016, Proceedings - 2010 1st IEEE Latin American Symposium on Circuits and Systems, LASCAS 2010. Piscataway, NJ: IEEE, p. 132-135 4 p. 7410238Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3 Citations (Scopus) -
VarVis: Visualizing Anatomical Variation in Branching Structures
Smit, N. N., Kraima, A., Jansma, D., DeRuiter, M., Eisemann, E. & Vilanova Bartroli, A., 2016, EuroVis 2016 - Short Papers. Bertini, E., Elmqvist, N. & Wischgoll, T. (eds.). The Eurographics Association, p. 1-5 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2017
Nullor-based circuits for quantum technology
Hoekstra, J., 2017, In: International Journal of Circuit Theory and Applications. 45, 7, p. 1001-1016 16 p.Research output: Contribution to journal › Special issue › Scientific › peer-review
3 Citations (Scopus) -
2016
BMC: Toolkit for Bayesian analysis of Computational Models using samplers
Thijssen, B., Dijkstra, T. M. H., Heskes, T. & Wessels, L., 2016, In: BMC Systems Biology. p. 1-8 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile12 Citations (Scopus)53 Downloads (Pure) -
2019
A new hybrid thermal comfort guideline for the Netherlands
Boerstra, A. C., van Hoof, J. & van Weele, A. M., 2019, Proceedings - Windsor Conference 2014: Counting the Cost of Comfort in a Changing World. Nicol, F., Roaf, S., Brotas, L. & Humphreys, M. A. (eds.). NCEUB 2014, p. 967-978 12 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1992
Radiation arising under uniform motion of the object by random-nonhomogeneous elastic system
Vesnitskij, A. I. & Metrikin, A. V., 1 Sept 1992, In: Prikladnaya Mekhanika. 28, 9, p. 46-50 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
1 Citation (Scopus) -
2021
THz frequency, Goniometric scanning system for human cornea using off-axis parabolic mirrors
Hu, Y., Baggio, M., Tamminen, A., Ala-Laurinaho, J., Brown, E., Dabironezare, S., Llombart, N., Deng, S. X., Wallace, V. & Taylor, Z. D., 2021, 2021 46th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2021: Proceedings. Danvers: IEEE, 1 p. 9567415. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; vol. 2021-August).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Closure to "Simulating nonresidential water demand with a stochastic end-use model"
Blokker, EJM., Pieterse-Quirijns, EJ., Vreeburg, JHG. & van Dijk, JC., 2013, In: Journal of Water Resources Planning and Management. 139, 3, p. 347-348 2 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2010
Multiobjective optimization of operational responses for contaminant flushing in water distribution networks
Alfonso, L., Jonoski, A. & Solomatine, DP., 2010, In: Journal of Water Resources Planning and Management. 136, 1, p. 48-58 11 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
1998
Environmental impacts of nutrient removal processes - case-study - discussion - reply.
van Loosdrecht, MCM. & van Veldhuizen, HM., 1998, In: Journal of Environmental Engineering. 124, 5, p. 482-483 2 p.Research output: Contribution to journal › Article › Scientific