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2007
Nano-hole Arrays in Thin Au/Pd Film on Glass, for High Speed Molecular Analysis
Piciu, OM., van der Krogt, MC., Tatar, F., Sarro, PM., Bossche, A., Docter, MW., Garini, Y. & Young, IT., 2007, Proceedings of 5th IEEE Conference on Sensors. s.n. (ed.). New York: IEEE Society, p. 608-611 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Polyimide sacrificial layer for an all-dray post-process surface micromachining module
Pham, TMH., Bagolini, A., de Boer, CR., Laros, JMW., Pakula, L., French, PJ. & Sarro, PM., 2003, Transducers'03 Digest of technical papers. Piscataway: IEEE Society, p. 813-816 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2004
A quantitative evaluation of pattern transfer across (111) surfaces in a (100) silicon wafer by contact masking and over-exposure
Venstra, WJ., Laros, M., Spronck, JW., Sarro, PM. & Eijk, J., 2004, Eurosensors XVIII. Palombie (ed.). Rome: University of Rome, p. 313-316 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1998
Experimental results of electron Confinement in a silicon drift detector with saw tooth shaped P(+) strips
Sonsky, J., Valk, H., Huizenga, J., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1998, Book of abstracts of the IEEE'98 Conference, Toronto, November 1998. p. -Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2009
A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation
Shen, C., Pham, TMH. & Sarro, PM., 2009, Micro Electro Mechanical Systems, 2009. M Sarro, P. & Hierold, C. (eds.). Sorrento, Italy: The Printing House, Inc., p. 383-386 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
4 Citations (Scopus) -
2006
A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness
van Zeijl, HW., Su, J., Paalvast, SL., Sarro, PM. & van Eijk, J., 2006, Proceedings of the 17th MME MicroMechanics Europe Workshop. s.n. (ed.). Southampton: H.Morgan Ed., p. 209-212 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1999
Fabrication of a focal plane array infrared detector for a satellite attitude control system
van Herwaarden, AW., van Herwaarden, FG., Molenaar, SA., Goudena, EJG., Laros, JMW., Sarro, PM., Schot, CA., van der Vlist, W., Blarre, L. & Krebs, JP., 1999, Transducers '99: digest of technical papers. Vol. 1. Tokyo: Institute of Electrical Engineers of Japan, p. 394-397 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Polymide sacrificial layer for an all-dry post-process surface micromachining module
Pham, TMH., Bagolini, A., de Boer, CR., Laros, JMW., Pakula, L., French, PJ. & Sarro, PM., 2003, TRANSDUCERS'03 Twelfth International conference on solid-state sensors, acuators and microsystems. s.n. (ed.). Piscataway: IEEE Society, p. 813-816 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate
Yan, B., Pham, HTM., Ma, Y., Zhuang, Y. & Sarro, PM., 2007, In: Applied Physics Letters. 91Research output: Contribution to journal › Article › Scientific › peer-review
17 Citations (Scopus) -
2002
Fluorescence measurements in thick-film polymer wells
Gray, BL., Iordanov, VP., Sarro, PM. & Bossche, A., 2002, Proceedings of SeSens 2002. Utrecht: STW Stichting voor de Technische Wetenschappen, p. 622-626 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2014
Feasibility of using NaCl to reduce membrane fouling in anaerobic membrane bioreactors
Yang, J., Zheng, T., Spanjers, H. & van Lier, JB., 2014, In: Water Environment Research. 86, 4, p. 340-345 6 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access6 Citations (Scopus) -
1999
Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions
Sarro, PM., Brida, D., van der Vlist, W., Pignatel, G. & Brida, S., 1999, Eurosensors XIII: proceedings [CD-ROM]. M Bartek (ed.). Delft: Delft University of Technology, p. 389-392 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Micromachining techniques for fabrication of integrated light modulating devices
Sakarya, S., 2003, s.l.: s.n.. 133 p.Research output: Thesis › Dissertation (TU Delft)
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2011
In situ HRTEM of a catalyst using a nanoreactor at 1 bar
Vendelbo, SB., Creemer, JF., Helveg, S., Morana, B., Mele, L., Molenbroek, AM., Sarro, PM., Zandbergen, HW. & Kooyman, PJ., 2011.Research output: Contribution to conference › Poster › Professional
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2006
a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness
Su, J., van Zeijl, HW., Paalvast, SL., Sarro, PM. & van Eijk, J., 2006, SAFE conferentie. SN (ed.). Veldhoven: SAFE, p. 394-397 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
49 Citations (Scopus) -
2008
Front to back-side 3D interconnects fabrication process based on controlled cu electroplating of high aspect ratio through silicon vias (HAR-TSVs)
Saadaoui, M., Wien, WHA., van Zeijl, HW., Schellevis, H., Laros, M. & Sarro, PM., 2008, 10th electronics packaging technology conference. Yang, T. & Kheng, T. (eds.). Singapore: IEEE Society, p. 219-223 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
8 Citations (Scopus) -
2000
Infrared thermal imaging of SiNx membranes
Irace, A., Breglio, G., Spirito, M. & Sarro, PM., 2000, Proceedings of SPIE, vol. 4130. BF Andresen, GF Fulop & M Strojnik (eds.). Bellingham: International Society for Optical Engineering, p. 1-7 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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1996
A Silicon Drift Detector used for the Read-out of a CsI:Tl Scintillator
Valk, H., Hijzen, EA., de Haas, JTM., Hollander, RW., van Eijk, CWE., Sarro, PM. & van Bogaard, A., 1996, Proceedings of the International Conference on Inorganic Scintillators and Their Applications, SCINT95. Dorenbos, P. & van Eijk, ECW. (eds.). Delft: Delft University Press, p. 544-546 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2008
A novel method to prevent pattern rotation in anisotropic wet etch
Shen, C., Pham, HTM., Dekker, R. & Sarro, PM., 2008, APCTP-ASEAN workshop on advanced material science and nanotechnology. van Nguyen, H. (ed.). Nha Trang, Vietnam: Academic press of vietnam academy of science and technology, p. 944-950 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
27 Citations (Scopus) -
2006
Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan
Creemer, JF., Zandbergen, HW. & Sarro, PM., 2006, IPC No. P70180NL00, Patent No. 1027025, Priority date 5 May 2006Research output: Patent
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2010
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Wei, J., Yue, C., Chen, ZL., Liu, ZW. & Sarro, PM., 2010, In: Journal of Micromechanics and Microengineering. 20, 6, p. 1-8 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access9 Citations (Scopus) -
1999
X-ray spectroscopy measurements with multi-anode saw tooth silicon drift detector
Sonsky, J., Huizenga, J., van Eijk, CWE. & Sarro, PM., 1999, Book of abstracts of the 5th International Conference on Position-Sensitive Detectors, University College London, September 13-17, 1999, United Kingdom. p. 24-24Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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Integration of a Hartmann-shack wavefront sensor
de Lima Monteiro, DW., Vdovin, G. & Sarro, PM., 1999, Proceedings. Singapore: World Scientific, p. 215-220 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2014
3D solid-state supercapacitors obtained by ALD coating of high-density carbon nanotubes bundles
Fiorentino, G., Vollebregt, S., Tichelaar, FD., Ishihara, R. & Sarro, PM., 2014, Proceedings - 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems. Ayazi, F. & Kim, CJ. (eds.). Piscataway, NJ, USA: IEEE Society, p. 342-345 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access8 Citations (Scopus) -
2002
Filtered photodiode arrays for NADH fluorescence analysis
Iordanov, VP., Bastemeijer, J., Ishihara, R., Sarro, PM., Bossche, A. & Vellekoop, MJ., 2002, Proceedings of SeSens 2002. Utrecht: STW Stichting voor de Technische Wetenschappen, p. 627-630 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Werkwijze voor het uitvoeren van een assay, inrichting daarvoor, alsmede een werkwijze voor het vervaardigen van een inrichting
Iordanov, VP., Sarro, PM., Wolffenbuttel, RF. & Vellekoop, MJ., 2003, IPC No. niet eerder opgenomen, Patent No. 1017989, Priority date 5 Nov 2002Research output: Patent
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2007
Integrated Silicon-polymer laterally stacked actuators for out-of-plane bending motion
Wei, J., Chu Duc, T. & Sarro, PM., 2007, Proc. 18th MicroMechanics Europe (MME 2006). s.n. (ed.). Guimares, Portugal: Univ.of Minho.Ed., p. 187-190 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
SENSING MICROGRIPPER WITH PID CONTROL
Phan Huu, P., Nguyen, VQ., Chu Duc, T. & Sarro, PM., 2008, Proc. of 2008 International Conference on Advanced Technologies for Communications. van Ngo, N. & Cheung, NK. (eds.). Hanoi, Vietnam: IEEE Society, p. 319-322 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2 Citations (Scopus) -
2009
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
Rajaraman, V., Pakula, LS., Pham, HTM., Sarro, PM. & French, PJ., 2009, Proc. IEEE MEMS 2009. Sarro, PM. & Hierold, C. (eds.). Sorrento, Italy: IEEE Society, p. 140-143 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
9 Citations (Scopus) -
2004
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2005
Polarization-insensitive PECVD SiC waveguides for photonic sensing
Pandraud, G., Pham, TMH., Pakula, L., Sarro, PM. & French, PJ., 2005, 17th International Conference on Optical Fibre Sensors. Voet, M., Willsch, R., Ecke, W., Jones, J. & Culshaw, B. (eds.). Bellingham: SPIE, p. 836-839 4 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 5855).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access1 Citation (Scopus) -
2006
Improved Thermal U-beam Actuators for Micro-assembly
Henneken, VA., Tichem, M. & Sarro, PM., 2006, XX Eurosensors. s.l (ed.). Göteborg: Chalmers University of Technology, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Through-wafer copper electroplating for 3-D interconnects
Nguyen, NT., Boellaard, E., Pham, HMT., Kiutchoukov, VG., Cracium, G. & Sarro, PM., 2001, MME 2001: workshop. S.l.: s.n., p. 74-77 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
Through-wafer copper electroplating for three-dimensional interconnects
Nguyen, NT., Boellaard, E., Pham, NP., Kutchoukov, VG., Craciun, G. & Sarro, PM., 2002, In: Journal of Micromechanics and Microengineering. 12, p. 395-399 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
121 Citations (Scopus) -
1999
X-ray Detection With Multi-anode Sawtooth Silicon Drift Detector
Sonsky, J., Huizenga, J., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1999, Book of abstracts of the IEEE 1999 Nuclear Science Symposium and Medical Imaging Conference, October 26-30, 1999, Seattle, USA. p. 9-9Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2011
A silicon-based MEMS resistojet for propelling cubesats
Mathew, TV., Zandbergen, BTC., Mihailovic, M., Creemer, JF. & Sarro, PM., 2011, Proceedings 62nd International Astronautical Congress (IAF). s.n. (ed.). Cape Town: IAF, p. 1-8 8 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2003
Fabrication of a CMOS compatible vertical accelerometer
Pakula, L., Yang, H., Pham, TMH., Sarro, PM. & French, PJ., 2003, EUROSENSORS 17th European conference on solid-state transducers. s.n. (ed.). Guimarães: University of Minho, p. 635-638 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2006
Optical Nano-hole Arrays for Molecular Recognition and Detection (U-SP-2-I-ICT)
Piciu, OM., van der Krogt, MC., Sarro, PM., Bossche, A. & Docter, MW., 2006, Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology¿APCOT 2006. s.n. (ed.). s.l.: apcot, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2005
Lateral nano-Newton force-sensing piezoresistive cantilever for micro-particels handling
Chu Duc, T., Creemer, JF. & Sarro, PM., 2005, Proceedings of the 16th MME Micromachining, Micromechanics and Microsystems Workshop 2005. s.n. (ed.). Göteborg, Sweden: MME, p. 268-271 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
Finite element modeling and experimental characterization of an electro-thermally actuated silicon-polymer micro gripper
Krecinic, F., Chu Duc, T., Lau, GK. & Sarro, PM., 2008, In: Journal of Micromechanics and Microengineering. 18, 6Research output: Contribution to journal › Article › Scientific › peer-review
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2007
Characterization of a Nozzle-Integrated Capacitive Sensor for Microfluidic Jet Systems
van der Velden, M., Spronck, JW., Munnig Schmidt, RH., Wei, J. & Sarro, PM., 2007, Proc. IEEE Sensors 2007 Conference. Mizaikoff, B. & French, PJ. (eds.). Atlanta, Georgia, USA: IEEE Society, p. 1241-1244 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2011
Mechanical robustness and hermeticity monitoring for MEMS thin film encapsulation
Santagata, F., 2011, 133 p.Research output: Thesis › Dissertation (TU Delft)
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2007
Sub-wavelength apertures in Au/Pd film for fluorescence measurements
Piciu, OM., van der Krogt, MC., Docter, MW., Garini, Y., Young, IT., Sarro, PM. & Bossche, A., 2007, Sub-wavelength apertures in Au/Pd film for fluorescence measurements. s.n. (ed.). Zeist, The Netherlands: Sense of Contact 2009, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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1999
IC-compatible two-level bulk micromachining for RF components
Pham, PN., Ng, TK., Laros, JMW., Scholtes, TLM., Sarro, PM. & Burghartz, JN., 1999, SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]. Utrecht: STW Technology Foundation, p. 359-362 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2012
A novel approach for piezoresistivity characterization of silicon nanowires
Nie, M., Santagata, F., Moh, TSY., Huang, Q-A. & Sarro, PM., 2012, Proc. 11th IEEE Sensors Conference. IEEE Society, p. 1747-1750 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Monocrystalline Si-based microhotplate heater
Mihailovic, M., Creemer, JF. & Sarro, PM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). Veldhoven, The Netherlands: STW, p. 498-501 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2005
ATTO-Liter Periodical Cavities for Optical BIO-Molecular Detection
Piciu, OM., van der Krogt, MC., Docter, MW., Sarro, PM. & Bossche, A., 2005, Proceedings of IEEE Sensors, 2005. s.n. (ed.). Irvine, California, USA: s.l., p. 452-456 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Monitoring enzymatic reactions in nanolitre wells
Young, IT., Moerman, R., van den Doel, LR., Iordanov, VP., Kroon, AR., Dietrich, HRC., van Dedem, GWK., Bossche, A., Gray, BL., Sarro, PM., Verbeek, PW. & van Vliet, LJ., 2003, In: Journal of Microscopy. 212, 3, p. 254-263 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
22 Citations (Scopus) -
2006
Electro-thermally activated polymeric stack for linear in-plane actuation
Lau, GK., Goosen, JFL., van Keulen, F., Chu Duc, T. & Sarro, PM., 2006, Proceedings of the 5th IEEE Conference on Sensors. Sukhan Lee & Masayoshi Esashi (eds.). IEEE Society, p. 538-541 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2002
Fabrication of crystalline membranes oriented in the (111)-plane in a (100) silicon wafer
Venstra, WJ. & Sarro, PM., 2002, MNE 2002. p. 1-2 2 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific